Sensofar S neox Grand Format

A high-performance, non-contact 3D optical profiler designed for advanced surface metrology applications of large panels in semiconductor, display, and PCB industries.

The S neox Grand Format Cleanroom provides three different optical technologies to image with the most suitable technology for each specific sample, achieving precision down to subnanometer levels.

Features

Expansive 600 x 600 mm travel range with an impressive speed up to one meter per second.
High vertical resolution down to 0.1 nm
High lateral resolution down to 0.1 μm
Integrated vibration isolation system for high-stability measurements
The enclosure is made of stainless steel, minimizing particle emissions
This advanced metrology tool is fully controlled by the easy-to-use Sensofar software

Benefits

Meets Semi S2 & S8 standards with TUV certification
Multiple measurement modes including confocal, phase-shifting interferometry, and focus variation to fit every application.
Inline processing ideal for semiconductors, FDP display and PCBs inspection and analysis.
Remove weight limitations With Unlimited measurement capabilities.
Enhanced safety certified for semiconductor characterization.
Cleanroom-friendly, minimizing particle emissions.

Built-In Acquisition Software

The Sensofar S neox GRAND is an advanced metrology tool with easy-to-use SensoSCAN software for automated measurements. It also includes SensoView analysis software and SensoPro for automated data analysis.